Time-of-Flight Secondary Ion Mass Spectroscopy (TOF-SIMS)

A surface-sensitive analytical technique that uses a pulsed ion beam to bombard a sample, ejecting charged particles (secondary ions) from the outermost surface layers, which are then analyzed based on their flight time through a vacuum chamber to determine their mass and thus identify the chemical composition of the sample surface with high spatial resolution

How It Works
  • High surface sensitivity
    Primarily analyzes the top few atomic layers of sample, making it ideal for studying surface chemistry and contamination
  • Chemical Imaging
    Can produce detailed chemical images with sub-micron resolution, allowing for visualization of surface variations and trace elements
  • Molecular Information
    Provides information about both elemental and molecular species present on the surface.
  • Pulsed ion beam
    A focused beam of primary ions (like Cs+ or Ga+) is pulsed to eject secondary ions from the sample.
  • Time-of-flight analysis
    Secondary ions are accelerated through a flight tube, and their mass is determined by measuring the time it takes them to reach the detector.