Energy Dispersive X-ray Spectroscopy/Mapping

A technique used to analyze the elemental composition of a sample by detecting the characteristics X-rays emitted from the sample when bombarded with electrons, typically within a SEM

How It Works
  • Functionality
    When a electron beam interacts with a sample, it knocks out electrons from inner shells, causing higher energy electrons to fall into the vacancy, releasing energy in the form of X-rays with specific energies characteristics of the element.
  • Elemental identification
    By analyzing the energy of the detected X-rays, EDS can identify the elements present in the sample.
  • Quantitative analysis
    The intensity of the X-ray signal is proportional to the concentration of the element, allowing for quantitative analysis of the elemental composition.
  • Elemental mapping
    By scanning the electron beam across the sample and recording the X-ray intensity at each point, EDS can create a visual map showing the distribution of specific elements across the sample surface.